Semiconductor Device Packages, Packaging Methods, and Packaged Semiconductor Devices

ABSTRACT

Semiconductor device packages, packaging methods, and packaged semiconductor devices are disclosed. In some embodiments, a package for a semiconductor device includes an integrated circuit die mounting region and a molding material disposed around the integrated circuit die mounting region. An interconnect structure is disposed over the molding material and the integrated circuit die mounting region. A protection pattern is disposed in a perimeter region of the package. The protection pattern includes a conductive feature.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. patent application Ser. No.15/997,413, filed on Jun. 4, 2018, entitled “Semiconductor Packages,Packaging Methods, and Packaged Semiconductor Devices,” whichapplication is a continuation of U.S. patent application Ser. No.15/353,334, filed on Nov. 16, 2016, entitled “Semiconductor Packages,Packaging Methods, and Packaged Semiconductor Devices,” now U.S. Pat.No. 9,991,247 issued on Jun. 5, 2018, which application is a divisionalof U.S. patent application Ser. No. 14/326,249, filed on Jul. 8, 2014,entitled “Semiconductor Device Packages, Packaging Methods, and PackagedSemiconductor Devices,” now U.S. Pat. No. 9,502,270 issued on Nov. 22,2016, which applications are hereby incorporated herein by reference.

BACKGROUND

Semiconductor devices are used in a variety of electronic applications,such as personal computers, cell phones, digital cameras, and otherelectronic equipment, as examples. Semiconductor devices are typicallyfabricated by sequentially depositing insulating or dielectric layers,conductive layers, and semiconductive layers of material over asemiconductor substrate, and patterning the various material layersusing lithography to form circuit components and elements thereon.

Dozens or hundreds of integrated circuits are typically manufactured ona single semiconductor wafer. The individual dies are singulated bysawing the integrated circuits along scribe lines. The individual diesare then packaged separately, in multi-chip modules, or in other typesof packaging.

The semiconductor industry continues to improve the integration densityof various electronic components (e.g., transistors, diodes, resistors,capacitors, etc.) by continual reductions in minimum feature size, whichallow more components to be integrated into a given area. These smallerelectronic components such as integrated circuit dies also requiresmaller packages that utilize less area than packages of the past, insome applications.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 is a cross-sectional view of a portion of a packagedsemiconductor device in accordance with some embodiments of the presentdisclosure, wherein a protection pattern is formed in a perimeter regionof the package.

FIG. 2 is a top view illustrating a protection pattern of a packagedsemiconductor device in accordance with some embodiments.

FIG. 3 is a cross-sectional view of a portion of a packagedsemiconductor device in accordance with some embodiments of the presentdisclosure, wherein a protection pattern is formed in conductive featurelayers of an interconnect structure in a perimeter region of thepackage.

FIG. 4 is a top view of the portion of the packaged semiconductor deviceshown in FIG. 3 in accordance with some embodiments.

FIG. 5 is a cross-sectional view of a portion of a packagedsemiconductor device in accordance with some embodiments of the presentdisclosure, wherein a protection pattern is formed in conductive featurelayers of an interconnect structure in a perimeter region of thepackage.

FIG. 6 is a top view of the portion of the packaged semiconductor deviceshown in FIG. 5 in accordance with some embodiments.

FIG. 7 is a cross-sectional view of a portion of a packagedsemiconductor device in accordance with some embodiments of the presentdisclosure, wherein a portion of the protection pattern is formed in athrough-via layer of the package.

FIG. 8 is a top view of the portion of the packaged semiconductor deviceshown in FIG. 7 in accordance with some embodiments.

FIG. 9 is a top view of a portion of a packaged semiconductor device,illustrating a portion of a protection pattern formed in a corner regionof the package in accordance with some embodiments.

FIGS. 10, 11, 12, and 13 are top views of a corner region of a packagedsemiconductor device that illustrate some exemplary shapes andarrangements of protection patterns in accordance with some embodiments.

FIG. 14 is a top view illustrating a dicing path disposed between twoadjacent packaged semiconductor devices that include protection patternsin accordance with some embodiments.

FIG. 15 is a cross-sectional view of a packaged semiconductor device inaccordance with some embodiments, wherein a first packaged semiconductordevice is coupled to a second packaged semiconductor device.

FIG. 16 is a flow chart of a method of packaging a semiconductor devicein accordance with some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Embodiments of the present disclosure provide novel packages forsemiconductor devices, methods of packaging semiconductor devices, andpackaged semiconductor devices wherein protection patterns are formed ina perimeter region of the package. The protection patterns protect thepackage area during dicing and may also be used as alignment patterns.

Referring first to FIG. 1, a cross-sectional view of a portion of apackaged semiconductor device 100 in accordance with some embodiments ofthe present disclosure is shown. The packaged semiconductor device 100includes a protection pattern 111 that is formed in a perimeter region110 of the package. The perimeter region 110 comprises a protectionpattern area that includes the protection pattern 111. The protectionpattern 111 comprises one or more conductive features 112, and comprisesa metal pattern in some embodiments, to be described further herein.

The packaged semiconductor device 100 includes an integrated circuit die102 that is packaged in a package that includes a molding material 116and an interconnect structure 120 disposed over the integrated circuitdie 102 and the molding material 116. The molding material 116 surroundsand encapsulates the integrated circuit die 102. The molding material116 comprises an insulating material such as a molding compound or anunderfill material, as examples. Through-vias 106 are formed in themolding material 116 in some embodiments, as shown in phantom (e.g., indashed lines) in FIG. 1. Only one through-via 106 is shown in phantom inFIG. 1; however, the packaged semiconductor device 100 may includedozens, hundreds, or more through-vias 106 formed therein. In otherembodiments, through-vias 106 are not included within the moldingmaterial 116. The interconnect structure 120 is electrically connectedto the integrated circuit die 102. The package includes an integratedcircuit die mounting region 104 wherein the integrated circuit die 102is disposed.

The protection pattern 111 is disposed in the perimeter region 110 ofthe package which is disposed between a package edge 142 and a dicingpath 113 of the package. The package edge 142 comprises a regionproximate the perimeter region 110 past which no conductive features areformed in the interconnect structure 120, in some embodiments. Thepackage edge 142 comprises an enclosure region or edge region of theinterconnect structure 120 in some embodiments, for example.

The dicing path 113 comprises a region wherein a plurality of thepackaged semiconductor devices 100 will be singulated using a dicingprocess (e.g., using a saw, laser, or other device) after the packagingprocess. The dicing path 113 may comprise a scribe line region or ascribe region of a wafer level packaging (WLP) technique in someembodiments, for example. The packaged semiconductor device 100comprises a WLP in some embodiments, which is formed over a carrier 101,shown in phantom. The carrier 101 is later removed, after the packagingprocess for the integrated circuit die 102, to be described furtherherein with reference to FIG. 16. In other embodiments, a carrier 101may not be included in the packaging process flow.

In some embodiments, the protection pattern 111 is disposed within amaterial layer that a portion of the interconnect structure 120 isformed in. For example, in FIG. 1, the protection pattern 111 comprisesa plurality of conductive features 112 that is disposed in theconductive feature layers, such as conductive line 128 layers andconductive via 130 layers, of the interconnect structure 120. Thus, noadditional processing steps or material layers are required to includethe conductive features 112 of the protection pattern 111 in thepackage. Existing lithography masks and packaging processes for theconductive features of the interconnect structure 120 can advantageouslybe modified to include the protection pattern 111 in the packagedsemiconductor device 100. In some embodiments, the interconnectstructure 120 comprises a plurality of conductive feature layers, andthe plurality of conductive features 112 of the protection pattern 111is disposed in one or more of the plurality of conductive feature layersof the interconnect structure 120.

Because the conductive features 112 of the protection pattern 111 areformed in the same material layer that conductive features in one ormore conductive feature layers of the interconnect structure 120 areformed in, the conductive features 112 of the protection pattern 111comprise the same material as the conductive features in the conductivefeature layer of the interconnect structure 120 in some embodiments. Theconductive features 112 comprise a metal in some embodiments, forexample. The metal comprises Cu, Al, W, or alloys, combinations, ormultiple layers thereof, as examples. The conductive features 112 mayalternatively comprise other materials.

In some embodiments, the conductive features 112 of the protectionpattern 111 comprise substantially the same size as conductive featuresin one or more conductive feature layers of the interconnect structure120. For example, because the conductive features 112 of the protectionpattern 111 are formed in the same material layer that conductivefeatures are formed in conductive layers of the interconnect structure120 are formed in, the conductive features 112 of the protection pattern111 comprise the same thickness as conductive features in conductivelayers of the interconnect structure 120. The conductive features 112 ofthe protection pattern 111 can be designed to have substantially thesame width as conductive features in conductive layers of theinterconnect structure 120.

For example, in some embodiments, a plurality of the conductive features112 comprises a plurality of first conductive features 112, and aplurality of the conductive feature layers in the interconnect structure120 comprises a plurality of second conductive features 128 and/or 130disposed therein. The plurality of first conductive features 112comprises a first size, and the plurality of second conductive features128 and/or 130 comprises a second size, the first size beingsubstantially the same as the second size.

Alternatively, the conductive features 112 of the protection pattern 111can be designed to have a different width than conductive features inconductive layers of the interconnect structure 120.

The interconnect structure 120 comprises a redistribution layer (RDL) ora post-passivation interconnect (PPI) structure in some embodiments. Theinterconnect structure 120 may alternatively comprise other types ofwiring structures. The interconnect structure 120 comprises fan-outregions of wiring for the packaged semiconductor device 100 in someembodiments. The fan-out regions of the interconnect structure 120provide a larger footprint for the package (e.g., for the under-ballmetallization (UBM) structure 132) than the footprint of contacts 124 onthe integrated circuit die 102, for example.

In some embodiments, the integrated circuit die 102 includes a pluralityof contact pads 124 formed on a surface thereof, and a passivationmaterial 108 is disposed over the integrated circuit die 102 andportions of the contact pads 124. Portions of the interconnect structure120 are coupled to the contact pads 124 of the integrated circuit die102 through openings in the passivation material 108. The passivationmaterial 108 may not be included. Portions of the interconnect structure120 may also be coupled to the through-vias 106, not shown, inembodiments wherein the through-vias 106 are included.

The interconnect structure 120 includes a plurality of insulatingmaterial layers 126 in some embodiments. The insulating material layers126 comprise a polymer or other insulating materials. A plurality ofconductive lines 128 and a plurality of conductive vias 130 are disposedwithin the insulating material layers 126. The interconnect structure120 may include one or more conductive line 128 layers and one or morevia 130 layers, in some embodiments.

The UBM structure 132 is formed over and/or within insulating materiallayer 126. The UBM structure 132 is coupled to the conductive lines 128and/or vias 130. Only one UBM structure 132 is shown in FIG. 1; however,a plurality of the UBM structures 132 is formed on the surface of theinterconnect structure 120. The conductive features of the interconnectstructure 120 comprising the conductive lines 128, vias 130, and the UBMstructure 132 may comprise a conductive material such as Cu, Al, W,other metals, or alloys, combinations, or multiple layers thereof, asexamples. The conductive features of the interconnect structure 120comprising the conductive lines 128 and vias 130, and the UBM structure132 are each formed in a conductive feature layer of the packagedsemiconductor device 100. Alternatively, the interconnect structure 120may comprise other types of conductive features and may be comprised ofother materials.

Connectors 122 (shown in phantom in FIG. 1) are coupled to the UBMstructure 132 in some embodiments. A plurality of the connectors 122 arecoupled to a plurality of the UBM structures 132 of the interconnectstructure 120 in some embodiments, for example. In other embodiments,the connectors 122 are not included in the packaged semiconductor device100. The connectors 122 comprise a eutectic material and may compriseconnectors formed in a ball grid array (BGA) arrangement or otherconfigurations, for example.

FIG. 2 is a top view of the portion of the packaged semiconductor device100 shown in FIG. 1 in accordance with some embodiments. The protectionpattern 111 extends along the package edge 142 of a side of the packagedsemiconductor device 100, within the perimeter region 110. In someembodiments, the package of the packaged semiconductor device 100comprises a plurality of sides, and the plurality of conductive features112 of the protection pattern 111 extends along the package edge 142 ofthe plurality of sides of the package. For example, two sides of thepackaged semiconductor device 100 are shown in FIG. 15. In a top view(not shown), the packaged semiconductor device 100 comprises a shape ofa square or rectangle in some embodiments, and the conductive features112 of the protection pattern extend along the package edge 142 of thefour sides of the package within the perimeter region 110, as anotherexample.

Referring again to FIG. 2, a top view of conductive features of theinterconnect structure 120 is also shown. Portions of conductive lines128 and UBM structures 132 and openings 118 a and 118 b in insulatingmaterial 126 are illustrated. Other portions of the insulating material126 are not shown, so that some portions of conductive lines 128 and UBMstructures 132 can be shown, for example. Dimension A comprises a widthof conductive lines 128, wherein dimension A comprises about 5 μm toabout 10 μm in some embodiments. Dimension B comprises a space betweenadjacent conductive lines 128, wherein dimension B comprises about 30 μmto about 50 μm in some embodiments. Dimension C comprises the distancebetween a conductive feature such as conductive line 128 and the packageedge 142, wherein dimension C comprises about 20 μm or greater in someembodiments. Alternatively, dimensions A, B, and C may comprise othervalues.

FIG. 3 is a cross-sectional view of a portion of a packagedsemiconductor device 100 in accordance with some embodiments of thepresent disclosure, wherein a protection pattern 111 is formed inconductive feature layers of an interconnect structure 120 (not shown inFIG. 3; see FIG. 1) in a perimeter region 110 of the package. Theconductive features 112 a and 112 b are formed in every conductivefeature layer of the interconnect structure 120 in the embodiments shownin FIG. 3, for example. In other embodiments, the conductive features112 a and/or 112 b are formed in one or more conductive feature layersof the interconnect structure 120.

The conductive features 112 a and/or 112 b are formed in the sameinsulating material layers 126 that conductive lines 128 and vias 130are formed in, in the interconnect structure 120. The molding material116 is disposed beneath the protection pattern 111 formed in theinsulating material layers 126.

Some dimensions of the protection pattern 111 are also shown in FIG. 3.Dimension a comprises a width of a conductive feature 112 a of theprotection pattern 111 formed in a conductive line 128 layer of aninterconnect structure 120, wherein dimension a comprises about 50 μm orless in some embodiments. Dimension a is substantially the same asdimension A of conductive lines 128 in the interconnect structure 120(see FIG. 2) in some embodiments. Alternatively, dimension a may belarger or smaller than dimension A.

Dimension b comprises a distance between a conductive feature 112 a or112 b and the dicing path 113, wherein dimension b comprises about 5 μmto about 10 μm in some embodiments. Dimension b is large enough toprevent damage to the protection pattern 111 during a dicing processalong the dicing path 113 in some embodiments, for example.Alternatively, in other embodiments, dimension b may be about o.Dimension b may also comprise other values.

Dimension W comprises a width of the perimeter region 110 that includesthe protection region area of the protection pattern 111. Dimension W isequal to (dimension a+dimension b). In some embodiments, dimension Wcomprises about 5 μm to about 60 μm.

Dimension w comprises a width of a conductive feature 112 b of theprotection pattern 111 formed in a via 130 layer of an interconnectstructure 120, wherein dimension w comprises about 5 μm to about 10 μmin some embodiments. Dimension w is substantially the same as a width ofvias 130 formed in a via 130 layer of the interconnect structure 120 insome embodiments. Alternatively, dimension w may be larger or smallerthan the width of vias 130.

Dimension d comprises a distance between adjacent conductive features112 b of the protection pattern 111 formed in a via 130 layer of theinterconnect structure 120, wherein dimension d comprises about 10 μm orgreater in some embodiments. Dimension d is substantially the same as aspacing between vias 130 formed in a via 130 layer of the interconnectstructure 120 in some embodiments. Alternatively, dimension d may bedifferent than the spacing between vias 130.

Dimension e comprises a distance between conductive features 112 b ofthe protection pattern 111 formed in a via 130 layer of the interconnectstructure 120 and the package edge 142, wherein dimension e comprisesabout 5 μm or greater in some embodiments. Dimension e also comprises adistance between conductive features 112 b and an edge of conductivefeatures 112 a formed in a conductive line 128 layer of the interconnectstructure 120, for example.

Dimensions a, b, W, w, d, and e may alternatively comprise other valuesin accordance with some embodiments of the present disclosure.

FIG. 4 is a top view of the portion of the packaged semiconductor device100 shown in FIG. 3 in accordance with some embodiments. The protectionpattern 111 extends fully along the package edge 142 to provideprotection for the packaged semiconductor device 100 during a dicingprocess and other processes. The conductive features 112 b of theprotection pattern 111 formed in a via 130 layer of the interconnectstructure 120 comprise continuous via bars in the embodiments shown.Alternatively, the conductive features 112 b may comprise non-continuousvia bars, as shown in FIG. 6, or the conductive features 112 b maycomprise a plurality of square, rectangular, circular, or other shapedfeatures 112 b (not shown).

In the embodiments shown in FIGS. 3 and 4, conductive features 112 aformed in conductive line 128 layers of the interconnect structure 120comprise substantially the same width. For example, a plurality of theconductive features 112 a of the protection pattern 111 is disposed in aplurality of conductive line 128 layers of the interconnect structure120, and two of the plurality of conductive features 112 a disposed intwo different ones of the plurality of conductive line 128 layerscomprise substantially the same width. In other embodiments, two of theplurality of conductive features 112 a disposed in two different ones ofthe plurality of conductive line 128 layers comprise different widths,as shown in FIG. 5, which is a cross-sectional view of a portion of apackaged semiconductor device 100 in accordance with some embodiments ofthe present disclosure. The protection pattern 111 is formed inconductive feature 128 layers of an interconnect structure 120 in aperimeter region 110 of the package, as described in the embodimentsshown in FIGS. 3 and 4. However, the conductive features 112 a comprisedifferent widths in the various conductive line 128 layers.

For example, dimension a₁ comprises a width of an uppermost conductivefeature 112 a, and dimension a₂ comprises a width of a lowermostconductive feature 112 a in FIG. 5. Dimension a₁ and a₂ comprise similardimensions as described for dimension a herein. Dimension a₁ isdifferent, e.g., larger than, dimension a₂ in the example shown.Dimension a₁ being different than dimension a₂ results in dimensions b,and dimension b₂ being different. Dimension b, and b₂ comprise similardimensions as described for dimension b herein.

Likewise, the conductive features 112 b may comprise different widths inthe various via 128 layers in the interconnect structure 120, alsoillustrated in FIG. 5. For example, dimension w₁ comprises a width of anuppermost conductive feature 112 b, and dimension w₂ comprises a widthof a lowermost conductive feature 112 b in FIG. 5. Dimension w₁ and w₂comprise similar dimensions as described for dimension w herein.Dimension w₁ is different, e.g., less than, dimension w₂ in the exampleshown.

In embodiments of the present disclosure wherein a plurality ofconductive features 112 b of the protection pattern 111 is disposed in aplurality of via 130 layers of the interconnect structure 120, two ofthe plurality of conductive features 112 b disposed in two differentones of the plurality of via 130 layers may be substantially aligned, asshown in FIG. 3. The uppermost conductive features 112 b are alignedwith the lowermost conductive features 112 b, for example.Alternatively, in other embodiments, two of the plurality of conductivefeatures 112 b disposed in two different ones of the plurality of via130 layers may not be aligned, as shown in FIG. 5. For example, theuppermost conductive features 112 b are not aligned with the lowermostconductive features 112 b in FIG. 5.

The various widths and non-alignment of the conductive features 112 aand 112 b results in dimensions e₁ and e₂ being different, alsoillustrated in FIG. 5. Dimension e₁ and e₂ comprise similar dimensionsas described for dimension e herein. FIG. 6 is a top view of the portionof the packaged semiconductor device 100 shown in FIG. 5 in accordancewith some embodiments. The various dimensions described herein for theprotection pattern 111 in FIG. 5 are illustrated in the top view.Conductive features 112 b comprising non-continuous via bar segmentsformed in the same material layers as vias 130 in a via 130 layer of theinterconnect structure 120 in accordance with some embodiments are alsoillustrated in FIG. 6.

FIG. 7 is a cross-sectional view of a portion of a packagedsemiconductor device 100 in accordance with some embodiments of thepresent disclosure, wherein a portion of the protection pattern 111 isformed in a through-via layer of the package. FIG. 8 is a top view ofthe portion of the packaged semiconductor device 100 shown in FIG. 7 inaccordance with some embodiments. The portion of the protection pattern111 may comprise substantially the same size as through-vias 106 formedin other regions of the package, below the interconnect structure 120.

For example, a plurality of through-vias 106 (see FIG. 1) may bedisposed within the molding material 116, and a portion of theprotection pattern 111 may include a conductive feature 112 c disposedwithin the molding material 116, as shown in FIGS. 7 and 8. Each of theplurality of through-vias 106 may comprise a first size, and theconductive feature 112 c disposed within the molding material 116 maycomprise a second size, the second size being substantially the same asthe first size.

Only one conductive feature 112 c disposed in the molding material 116is shown in FIG. 7; however, the protection pattern 111 may include aplurality of conductive features 112 c disposed in the molding material116. The conductive feature 112 c of the protection pattern 111comprises a size or width comprising dimension A_(v), wherein dimensionA_(v) comprises about 100 μm or greater in some embodiments. Theconductive feature 112 c is spaced apart from the dicing path 113 by anamount comprising dimension b_(v), wherein dimension by comprises about5 μm to about 10 μm in some embodiments. Alternatively, dimensions A_(v)and by may comprise other values.

In the embodiments shown in FIGS. 7 and 8, a portion of the conductivefeature 112 c may extend past the package edge 142 of the packagedsemiconductor device into a region disposed beneath the interconnectstructure 120. In other embodiments, a portion of the conductive feature112 c may not extend past the package edge 142 of the packagedsemiconductor device into a region disposed beneath the interconnectstructure 120, not shown.

FIG. 9 is a top view of a portion of a packaged semiconductor device100, illustrating a portion of a protection pattern 111 formed in acorner region 134 of the package in accordance with some embodiments.The corner regions 134 of the package are reinforced with additionalconductive material in empty areas of the interconnect structure 120(e.g., in regions of the interconnect structure 120 containing noconductive features) in some embodiments. For example, in FIG. 9,conductive features 112 a each comprise a first conductive member. Thetwo first conductive members 112 a are coupled together in the cornerregion 134. The two first conductive members 112 a are coupled togethersubstantially at a right angle. Thus, the two first conductive members112 a are substantially perpendicular to one another, in someembodiments.

The protection pattern 111 further includes a second conductive member112 d disposed between the two first conductive members 112 a in thecorner region 134 of the package. The two first conductive members 112 aand the second conductive member 112 d comprise a substantiallytriangular shape in the top view.

A length of the two first conductive members 112 a comprises a dimensionx in some embodiments. Dimension x comprises [2*(a minimal value ofdimension C)] in some embodiments. Dimension x comprises about 40 μm insome embodiments, for example. Dimension x comprises about 40 μm inembodiments wherein a minimal value of dimension C comprises about 20μm, for example. Alternatively, dimension x may comprise other values.

A portion of the conductive features of the protection pattern 111(e.g., second conductive member 112 d) extends past a package edge 142of the package into a region disposed beneath or proximate theinterconnect structure 120 in some of the embodiments shown in FIG. 9through 13, for example.

FIGS. 10, 11, 12, and 13 are top views of a corner region 134 of apackaged semiconductor device 100 that illustrate some exemplary shapesand arrangements of protection patterns 111 in accordance with someembodiments. A plurality of third conductive members 112 e, 112 f,and/or 112 g are coupled between the second conductive feature 112 d andone of the two first conductive members 112 a or 112 a′, or between boththe second conductive member 112 d and the two first conductive members112 a and 112 a′.

For example, in the embodiments shown in FIG. 10, the protection pattern111 in the corner region 132 includes a plurality of third conductivemembers 112 e that are coupled between the second conductive member 112d and first conductive member 112 a′. The third conductive members 112 eare oriented in a vertical direction in the view shown. In theembodiments shown in FIG. 11, a plurality of third conductive members112 f are coupled between the second conductive member 112 d and firstconductive member 112 a. The third conductive members 112 f are orientedin a horizontal direction.

In the embodiments shown in FIG. 12, the structures shown in FIGS. 10and 11 are combined. The protection pattern 111 in the corner region 134includes a plurality of third conductive members 112 e oriented in avertical direction that are coupled between the second conductive member112 d and first conductive member 112 a′, and a plurality of thirdconductive members 112 f oriented in a horizontal direction that arecoupled between the second conductive member 112 d and first conductivemember 112 a. The third conductive members 112 e and 112 f form a gridshaped arrangement of conductive features disposed between the secondconductive member 112 d and the first conductive members 112 a and 112a′.

In FIG. 13, the protection pattern 111 in the corner region 134comprises a plurality of third conductive members 112 g that are coupledbetween the second conductive member 112 d and both of the firstconductive members 112 a and 112 a′. The third conductive members 112 gextend in parallel from the second conductive member 112 d at an angletowards both of the first conductive members 112 a and 112 a′.

The structures shown in corner regions 134 of the packages shown inFIGS. 9 through 13 are merely examples. The arrangement of the fortifiedand reinforced protection patterns 111 in corner regions 134 of thepackaged semiconductor device 100 may alternatively comprise othershapes, configurations, and arrangements. Additional conductive memberscomprising different shapes and patterns may also be used.

FIG. 14 is a top view illustrating a dicing path 113 that is disposedbetween two adjacent packaged semiconductor devices 100 that includeprotection patterns 111 in perimeter regions 110 in accordance with someembodiments. The novel protection patterns 111 provide a controlstructure for the dicing path 113, limiting dicing between theprotection patterns 111 and also providing alignment for the dicingprocess and other processes of the packaged semiconductor devices 100.

FIG. 15 is a cross-sectional view of a packaged semiconductor device 170in accordance with some embodiments, wherein a packaged semiconductordevice 100 described herein is coupled to another packaged semiconductordevice 150. The packaged semiconductor device 100 comprises a firstpackaged semiconductor device 100 in some embodiments, and the firstpackaged semiconductor device 100 is coupled to a second packagedsemiconductor device 150 by a plurality of connectors 158. Theconnectors 158 which may comprise solder balls or other materials arecoupled between contact pads of the first packaged semiconductor device100 and contact pads of the second packaged semiconductor device 150,for example. Some contact pads are coupled to the integrated circuit die102 and some of the contact pads are coupled to the through-vias 106, insome embodiments. In some embodiments, the packaged semiconductor device170 comprises a package-on-package (PoP) device, for example.

The interconnect structure 120 comprises a first interconnect structure120 a in some embodiments. A second interconnect structure 120 b isformed on an opposite side of the package than the side the firstinterconnect structure 120 a is formed on, in some embodiments. Thefirst interconnect structure 120 a comprises a front side RDL, and thesecond interconnect structure 120 b comprises a back side RDL, in someembodiments.

The packaged semiconductor device 100 includes a plurality of thethrough-vias 106 formed within the material 116. The through-vias 106provide vertical connections for the packaged semiconductor device 100.The interconnect structures 120 a and 120 b provide horizontalelectrical connections for the packaged semiconductor device 100.Packaged semiconductor device 150 also includes an interconnectstructure 120 c that provides horizontal electrical connections for thepackaged semiconductor device 150. Interconnect structure 120 c iscoupled to interconnect structure 120 b by a plurality of the connectors158.

The second packaged semiconductor device 150 includes one or moreintegrated circuit dies 156 coupled to a substrate 154. In someembodiments, the dies 156 comprise memory chips. For example, the dies156 may comprise dynamic random access memory (DRAM) devices in someembodiments. Alternatively, the dies 156 may comprise other types ofchips. Wire bonds 152 may be coupled to contact pads on a top surface ofthe integrated circuit die or dies 156, which are coupled to bond padson the substrate 154. The wire bonds 152 provide vertical electricalconnections for the packaged semiconductor device 150 in someembodiments, for example. A molding material 148 may be disposed overthe wire bonds 152, the integrated circuit die or dies 156, and thesubstrate 154.

Alternatively, a PoP device 170 may include two packaged semiconductordevices 100 described herein that are coupled together in someembodiments, not shown in the drawings. In some embodiments, the PoPdevice 170 may comprise a system-on-a-chip (SOC) device, as anotherexample.

In some embodiments, an insulating material 160 is disposed between thepackaged semiconductor devices 100 and 150 between the connectors 158,as shown in phantom (e.g., in dashed lines) in FIG. 15. The insulatingmaterial 160 may comprise an underfill material or a molding material,as examples. Alternatively, the insulating material 160 may compriseother materials, or the insulating material 160 may not be included.

FIG. 16 is a flow chart 180 that illustrates of a method of packaging asemiconductor device in accordance with some embodiments. The methodshown in FIG. 16 is an example; however, other methods may also be usedthat include the novel protection patterns 111 described herein. Theflow chart 180 will next be described. FIG. 1 can also be referred toview the elements of the packaged semiconductor device 100.

First, a carrier 101 shown in phantom in FIG. 1 is provided. The carrier101 may comprises a first carrier in some embodiments. The carrier 101may comprise glass, silicon oxide, aluminum oxide, or a semiconductorwafer, as examples. The carrier 101 may also comprise other materials.

An integrated circuit die 102 is also provided. The integrated circuitdie 102 may be previously fabricated on a semiconductor wafer andsingulated along scribe lines to form individual integrated circuit dies102, for example. The integrated circuit die 102 may comprise a logicchip, a memory chip, a processor, an application specific device, or achip having other functions, as examples. Only one integrated circuitdie 102 is shown in the drawings; however, a plurality of integratedcircuit dies 102 may be packaged over the carrier 101 simultaneously,and the packaged devices are later singulated to form individuallypackaged dies 102 or a plurality of dies 102 packaged together in asingle package.

In step 182 of the flow chart 180 shown in FIG. 16, the integratedcircuit die 102 is coupled to the carrier 101 manually or using anautomated machine such as a pick-and-place machine. The integratedcircuit die 102 is coupled to the carrier 101 in the integrated circuitdie mounting region 104 as shown in FIG. 1 using an adhesive or a dieattach film (DAF), not shown. In some embodiments, one integratedcircuit die 102 is coupled to the carrier 101 and is packaged using thetechniques described herein. In other embodiments, two or moreintegrated circuit dies 102 may be coupled to the carrier 101 andpackaged together in a single packaged semiconductor device 100 (notshown in the drawings). A plurality of integrated circuit dies 102comprising the same or different functions may be packaged together inaccordance with some embodiments, for example. One or more types ofintegrated circuit dies 102 may be packaged in a single packagedsemiconductor device 100 to form a system on a chip (SoC) device in someembodiments, for example.

In step 184, a molding material 116 is formed over the carrier 101 overthe integrated circuit die 102. As applied, the molding material 116 mayextend over a top surface of the die 102. The molding material 116 isformed around the integrated circuit die 102. The molding material 116may be molded using compressive molding, transfer molding, or othermethods. The molding material 116 encapsulates the integrated circuitdies 102, for example. The molding material 116 may comprise an epoxy,an organic polymer, or a polymer with or without a silica-based or glassfiller added, as examples. In some embodiments, the molding material 116comprises a liquid molding compound (LMC) that is a gel type liquid whenapplied. Alternatively, the material molding 116 may comprise otherinsulating and/or encapsulating materials, or other materials.

In some embodiments, the material molding 116 is applied so that itextends to top surfaces of the integrated circuit dies 102. The topsurface of the material 116 is substantially coplanar with top surfacesof the integrated circuit dies 102 in some embodiments, for example. Ifthe molding material 116 extends over top surfaces of the integratedcircuit dies 102 after the material 116 is applied, the molding material116 is removed from over the top surfaces of the integrated circuit dies102 using a chemical-mechanical polish (CMP) process, an etch process,other methods, or combinations thereof, in some embodiments. The moldingmaterial 116 is left remaining around the integrated circuit dies 102.

Next, the molding material 116 is cured using a curing process in someembodiments. The curing process may comprise heating the moldingmaterial 116 to a predetermined temperature for a predetermined periodof time, using an anneal process or other heating process. The curingprocess may also comprise an ultra-violet (UV) light exposure process,an infrared (IR) energy exposure process, combinations thereof, or acombination thereof with a heating process. Alternatively, the moldingmaterial 116 may be cured using other methods. In some embodiments, acuring process is not required for the molding material 116.

In step 186, an interconnect structure 120 is formed over the integratedcircuit die 102 and the material 116. The interconnect structure 120 isformed over a first side of the integrated circuit die 102 and thematerial 116 in some embodiments. The first side comprises a front sideof the packaged semiconductor device 100 in some embodiments, forexample. The interconnect structure 120 a comprises one or moreinsulating material layers 126 and conductive features 128 and 130formed in the insulating material layers 126. The interconnect structure120 may be formed using one or more subtractive etch processes ordamascene processes, for example. The interconnect structure 120comprises a first interconnect structure 120 a in some embodiments (seeFIG. 15).

The interconnect structure 120 and the molding material 116 comprise apackage for the integrated circuit die 102 in some embodiments, asdescribed in step 186.

In step 188, a protection pattern 111 is formed in a perimeter region110 of the package, as shown in FIG. 1. The protection pattern 111comprises a conductive feature 112. Step 188 is performed simultaneouslywith step 186 in some embodiments. The interconnect structure 120 andthe protection pattern 111 are simultaneously formed in someembodiments, for example. The protection patterns 111 are formed in theperimeter region 110 during the fabrication of the interconnectstructure 120, for example. The protection patterns 111 are formed inmaterial layers of the interconnect structures 120, as describedpreviously herein.

In some embodiments, after the interconnect structure 120 is formed, thecarrier 101 is removed (step 190), and the packaging process for thepackaged semiconductor device 100 is complete. A plurality of thepackaged semiconductor devices 100 are then singulated using a saw bladeor laser along the dicing paths 113. The protection patterns 111 protectthe packaged semiconductor devices 100 during the dicing process andprevent or reduce chipping of material layers of the interconnectstructure 120, advantageously.

In other embodiments, a plurality of connectors 122 is formed on theinterconnect structure 120, also shown in FIG. 1 in phantom. Theconnectors 122 are formed on UBM structures 132 of the interconnectstructure 120, for example. The connectors 122 comprise a eutecticmaterial such as solder, and may comprise solder balls or solder pastein some embodiments. The connectors 122 may include other types ofelectrical connectors, such as microbumps, controlled collapse chipconnection (C4) bumps, or pillars, and may include conductive materialssuch as Cu, Sn, Ag, Pb, or the like.

In some embodiments, after the connectors 122 are formed, the carrier101 is removed, and the packaging process for the packaged semiconductordevice 100 is complete. A plurality of the packaged semiconductordevices 100 are then singulated using a saw blade or laser along thedicing paths 113.

In other embodiments, a second carrier (not shown) is coupled to theconnectors 122 and to the interconnect structure 120, after forming theconnectors 122. The second carrier may be coupled to the connectors 122and/or to the interconnect structure 120 using a temporary adhesive, forexample. The first carrier 101 is then removed.

In some embodiments, a second interconnect structure 120 b (see FIG. 15)is then formed on a second side of the integrated circuit die 102 andthe molding material 116, the second side being opposite the first side.The second side comprises a back side of the packaged semiconductordevice 100 in some embodiments, for example. The second interconnectstructure 120 b comprises similar materials and features as describedfor the first interconnect structure 120 a, for example.

A plurality of connectors 158 is coupled to the second side of thepackaged semiconductor device 100 in some embodiments (see FIG. 15). Theconnectors 158 are coupled to portions of the second interconnectstructure 120 b in some embodiments, such as contact pads (not shown),for example. The connectors 158 comprise similar materials and formationmethods as described for connectors 122 in some embodiments, forexample. The second carrier 101 b and adhesive are then removed ordebonded from a plurality of the packaged semiconductor devices 100, andthe packaged semiconductor devices 100 are then singulated using a sawblade or laser along the dicing paths 113.

The packaged semiconductor devices 100 can then be electrically andmechanically coupled to another packaged semiconductor device, to aprinted circuit board (PCB), or in an end application or to anotherobject using the connectors 122 and/or 158.

In some embodiments, a method of packaging a semiconductor deviceincludes forming an interconnect structure 120 wherein the interconnectstructure 120 comprises a redistribution layer (RDL) or apost-passivation interconnect (PPI) structure.

In some embodiments, a method of packaging a semiconductor deviceincludes forming a plurality of integrated circuit 102 dies to a carrier101, and forming the molding material 116 around each of the pluralityof integrated circuit dies 102. An interconnect structure 120 is formedover each of the plurality of integrated circuit dies 102. A protectionpattern 111 is formed in a perimeter region 110 of each of the pluralityof integrated circuit dies 102. The plurality of packaged integratedcircuit dies 102 are separated along a dicing path 113 proximate theprotection patterns 111.

In other embodiments, a method of packaging a semiconductor devicefurther includes aligning the package using the protection pattern 111.

Some embodiments of the present disclosure include packages forsemiconductor devices, and methods of packaging semiconductor devices.Other embodiments include packaged semiconductor devices 100 that havebeen packaged using the novel methods described herein.

Some advantages of embodiments of the present disclosure includeproviding novel packaging structures and methods wherein protectionpatterns are included in perimeter regions of packaged semiconductordevices to provide protection for interconnect structure material layersduring a dicing process along a dicing path. No additional packagingprocess steps, lithography masks, lithography processes, or costs arerequired to include the protection patterns in semiconductor devicepackages. The protection patterns comprise metal patterns that are addedat outer edge of the packages.

The protection patterns prevent or reduce cracking and chipping ofconductive material layers and insulating material layers of theinterconnect structures, and thus improve yields, provide a costsavings, and result in improved quality. The protection patterns alsofunction as guides during the dicing process, providing improvedcontrol. The protection patterns further function as alignment patternsduring the dicing process and other processing steps of the packagingprocess flow, such as alignment marks for a subsequent pick-and-placeprocess used to place the packaged semiconductor devices 100 onto acarrier, as an example. Furthermore, the protection patterns and novelpackaging methods and structures described herein are easilyimplementable in manufacturing and packaging process flows.

In some embodiments, a package for a semiconductor device includes anintegrated circuit die mounting region, a molding material disposedaround the integrated circuit die mounting region, and an interconnectstructure disposed over the molding material and the integrated circuitdie mounting region. A protection pattern is disposed in a perimeterregion of the package. The protection pattern comprises a conductivefeature.

In some embodiments, a packaged semiconductor device includes a moldingmaterial, an integrated circuit die disposed within the moldingmaterial, and an interconnect structure disposed over the moldingmaterial and the integrated circuit die. The molding material and theinterconnect structure comprise a package for the integrated circuitdie. A protection pattern is disposed in a perimeter region of thepackage. The protection pattern comprises a plurality of conductivefeatures. The protection pattern is disposed between a package edge anda dicing path of the package.

In other embodiments, a method of packaging a semiconductor deviceincludes coupling an integrated circuit die to a carrier, forming amolding material around the integrated circuit die, and forming aninterconnect structure over the molding material and the integratedcircuit die. The interconnect structure and the molding materialcomprise a package for the integrated circuit die. The method includesforming a protection pattern in a perimeter region of the package,wherein the protection pattern comprises a conductive feature. Thecarrier is removed.

A representative method embodiment includes steps of: coupling anintegrated circuit die to a carrier; forming a molding material aroundthe integrated circuit die; forming an interconnect structure over themolding material and the integrated circuit die, wherein theinterconnect structure and the molding material comprise a package forthe integrated circuit die; forming a protection pattern in a perimeterregion of the package that is electrically isolated from theinterconnect structure, wherein the protection pattern comprises aconductive feature; and removing the carrier. Forming the interconnectstructure may comprise forming a redistribution layer (RDL) or apost-passivation interconnect (PPI) structure. The interconnectstructure and the protection pattern may be formed substantiallysimultaneously. The method may further comprise coupling a plurality ofintegrated circuit dies to the carrier, wherein forming the moldingmaterial comprises forming the molding material around each of theplurality of integrated circuit dies, wherein forming the interconnectstructure comprises forming the interconnect structure over each of theplurality of integrated circuit dies, wherein forming the protectionpattern comprises forming a protection pattern in a perimeter region ofeach of the plurality of integrated circuit dies, and wherein the methodfurther comprises separating packaged integrated circuit dies along adicing path proximate the protection patterns. The method may furthercomprise aligning the package using the protection pattern.

Another representative embodiment includes steps of: depositing amolding material; disposing an integrated circuit die within the moldingmaterial; forming an interconnect structure in the molding material, theinterconnect structure disposed within a perimeter region of a packagefor the integrated circuit die, wherein the molding material and theinterconnect structure comprise the package for the integrated circuitdie, and the interconnect structure is electrically connected to theintegrated circuit die directly or indirectly or is operable to provideelectrical connections between the package and components connected tothe package; and forming a protection pattern partially disposed in theperimeter region of the package, the protection pattern separate fromthe interconnect structure, wherein the protection pattern comprises aplurality of conductive features that are not electrically connected tothe integrated circuit die either directly or indirectly, and theprotection pattern does not extend beyond surfaces of the package. Theplurality of conductive features may extend along the perimeter regionof a plurality of sides of the package. Forming the protection patternmay further comprise the plurality of conductive features disposed in aplurality of conductive line layers of the interconnect structure,wherein two of the plurality of conductive features disposed in twodifferent ones of the plurality of conductive line layers comprisesubstantially a same width. Forming the protection pattern may furthercomprise the plurality of conductive features disposed in a plurality ofconductive line layers of the interconnect structure, wherein two of theplurality of conductive features disposed in two different ones of theplurality of conductive line layers comprise different widths. Formingthe protection pattern may further comprise the plurality of conductivefeatures disposed in a plurality of via layers of the interconnectstructure, wherein two of the plurality of conductive features disposedin two different ones of the plurality of via layers are substantiallyaligned. Forming the protection pattern may further comprise theplurality of conductive features disposed in a plurality of via layersof the interconnect structure, wherein two of the plurality ofconductive features disposed in two different ones of the plurality ofvia layers are not aligned. Forming the protection pattern may furthercomprise the plurality of conductive features having a plurality offirst conductive members, wherein two of the plurality of firstconductive members are coupled together in a corner region of thepackage, the protection pattern comprising a second conductive memberdisposed between the two of the plurality of first conductive members inthe corner region of the package, and the two of the plurality of firstconductive members and the second conductive member comprising asubstantially triangular shape. The two of the plurality of firstconductive members may be substantially perpendicular to one another.The protection pattern may have a plurality of third conductive membersdisposed between the second conductive member and one of the two of theplurality of first conductive members or between the second conductivemember and the two of the plurality of first conductive members.

Yet another representative embodiment includes steps of: disposing amolding material disposed around a mounting region of an integratedcircuit die mounting region; depositing an insulating layer over theintegrated circuit die mounting region and the molding material, theinsulating layer having a bottom surface and a top surface, the bottomsurface adjacent to the integrated circuit die mounting region and themolding material; forming an interconnect structure in the insulatinglayer, the interconnect structure configured to provide electricalconnections extending between the top surface of the insulating layerand the bottom surface of the insulating layer; and forming a protectionpattern in a perimeter region of the molding material, the perimeterregion being adjacent to the interconnect structure, wherein theprotection pattern comprises conductive features separate from theinterconnect structure, the conductive features electrically isolatedfrom the interconnect structure, and a topmost surface of the conductivefeatures below a top surface of the insulating layer. Forming theprotection pattern may further comprise disposing the protection patternwithin the insulating layer that a portion of the interconnect structureis formed in. The protection pattern may have a plurality of conductivefeatures. Forming the protection pattern may further comprise disposinga plurality of through-vias within the molding material, each of theplurality of through-vias comprising a first size, wherein a portion ofthe protection pattern includes a conductive feature disposed within themolding material, and wherein the conductive feature disposed within themolding material comprises a second size, the second size beingsubstantially equal to the first size. A portion of the conductivefeature may extend past a package edge into a region disposed beneath orproximate the interconnect structure. Forming the protection pattern mayfurther comprise disposing the protection pattern between a package edgeand a dicing path, wherein the interconnect structure is positionedinternal to the package edge.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A semiconductor device comprising: a protectionpattern located over an encapsulant; a dielectric material isolating theprotection pattern, the dielectric material extending from over theencapsulant to over a semiconductor die; conductive redistributionelements within the dielectric material, the conductive redistributionelements electrically connecting the semiconductor die to an externalconnection; and a packaged semiconductor device connected to theexternal connection.
 2. The semiconductor device of claim 1, wherein thepackaged semiconductor device is a package-on-package device.
 3. Thesemiconductor device of claim 2, wherein the package-on-package devicecomprises dynamic random access memory devices.
 4. The semiconductordevice of claim 1, wherein the conductive redistribution elements are asame size as conductive elements of the protection pattern.
 5. Thesemiconductor device of claim 1, further comprising through viasextending from a first side of the encapsulant to a second side of theencapsulant.
 6. The semiconductor device of claim 1, wherein a portionof the protection pattern material extends beneath the conductiveredistribution elements.
 7. A semiconductor device comprising: aconductive redistribution layer extending over both a firstsemiconductor device and an encapsulant adjacent to the firstsemiconductor device; a protection pattern located over the encapsulant,the protection pattern comprising a second conductive material;dielectric material electrically isolating the protection pattern; and apackage-on-package device electrically connected to the firstsemiconductor device through an external connection and the conductiveredistribution layer.
 8. The semiconductor device of claim 7, whereinthe package-on-package device comprises a first memory chip connected toa substrate.
 9. The semiconductor device of claim 8, wherein the firstmemory chip is electrically connected to the substrate through wirebonds.
 10. The semiconductor device of claim 8, further comprising asecond memory chip bonded to the first memory chip.
 11. Thesemiconductor device of claim 7, wherein the package-on-package deviceis a system-on-a-chip device.
 12. The semiconductor device of claim 7,wherein the protection pattern comprises a first conductive featureoverlying a second conductive feature, the first conductive featurebeing electrically connected to the second conductive feature throughvias, and wherein the first conductive feature has a greater dimensionthan the second conductive feature.
 13. The semiconductor device ofclaim 7, wherein the protection pattern comprises a first conductivefeature overlying a second conductive feature, the first conductivefeature being electrically connected to the second conductive featurethrough vias, and wherein the first conductive feature is not alignedwith the second conductive feature.
 14. The semiconductor device ofclaim 7, wherein a portion of the second conductive material extendsbeneath the conductive redistribution layer.
 15. A semiconductor devicecomprising: a semiconductor die encapsulated within an encapsulant; aplurality of first conductive layers overlying both the semiconductordie and the encapsulant; a plurality of second conductive layersoverlying the encapsulant, wherein individual ones of the plurality ofsecond conductive layers are aligned with respective ones of theplurality of first conductive layers; a dielectric material electricallyisolating the plurality of first conductive layers from the plurality ofsecond conductive layers; external connectors connected to the pluralityof first conductive layers; a substrate bonded to the externalconnectors; a first memory chip connected to the external connectorsthrough the substrate; and a second memory chip connected to theexternal connectors through the substrate.
 16. The semiconductor deviceof claim 15, wherein the first memory chip is connected to the externalconnectors at least in part with a wire bond.
 17. The semiconductordevice of claim 15, wherein the substrate, the first memory chip, andthe second memory chip are part of a package-on-package device.
 18. Thesemiconductor device of claim 15, wherein individual ones of theplurality of second conductive layers are misaligned with each other.19. The semiconductor device of claim 15, further comprising a throughvia extending from a first side of the encapsulant to a second side ofthe encapsulant.
 20. The semiconductor device of claim 15, wherein thedielectric material has a first dimension between the first conductivelayers and the second conductive layers, the first dimension beinggreater than at least 20 μm.